MEMS器件及系统中心

教育背景 

2007.09-2011.07，北京大学，信息科学与技术学院微电子学系，研究生/博士学位  

2004.09-2007.07，中北大学，电子科学与技术系，研究生/硕士学位  

2000.09-2004.07，中北大学，电子工程系，本科/学士学位  

工作简历  

2020年7月-至今，中国科学院，微电子研究所，研究员； 

2013.12-2020年6月， 中国科学院，微电子研究所，副研究员； 

2011.07-2013.12，中国科学院，微电子研究所，助理研究员；中国科学院江苏物联网研究发展中心，助理研究员； 

2008.09-2008.11，美国加州大学戴维斯分校，访问学者。

1. Ruirui Li, Haiyang Mao*, Menghua Zhu, Yudong Yang, Jijun Xiong*, and Weibing Wang,“Facile preparation of Broadband Absorbers Based on Patternable Candle Soot for Applications of Optical Sensors,” Sens. Actuators A: Phys., 2018, 285, 111-117.

2. Yudong Yang, Haiyang Mao*, Jijun Xiong*, Yucong Jia, Ruirui Li, and Weibing Wang, "Optical Features of Nanowire Forests Prepared by A Plasma Repolymerization Technique," IEEE Transactions on Nanotechnology, 2018, 17(4), 719-722.

3. Haiyang Mao*, Chengjun Huang, Wengang Wu, Mei Xue, Yudong Yang, Jijun Xiong, Anjie Ming and Weibing Wang, “Wafer-level Fabrication of Nanocone Forests by Plasma Repolymerization Technique for Surface-enhanced Raman Scattering Devices,” Applied Surface Science, 2017,396,1085-1091.

4. Wengang Wu, Haiyang Mao, Xiang Han, Jun Xu, and Weibing Wang, “Fabrication and characterization of SiO2/Si heterogeneous nanopillar arrays,” Nanotechnology, 2016, 27, 305301(9pp).

5. Haiyang Mao, Wengang Wu, Didi She, Gongchen Sun, Pengpeng Lv, and Jun Xu, “Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by Oxygen-Plasma-Stripping-of-Photoresist Technique,” Small , 2014, 10(1), 127-134

6. Mao H*, Yuanjing Chen, Yi Ou, Wen Ou, Jijun Xiong, Chunjuan You, Qiulin Tan, and Dapeng Chen, “Fabrication of Nanopillar Forests with High Infrared Absorptance Based on Rough Poly-Si and Spacer Technology,” J. Micromech. Microeng., 23 (2013), 095033.

7. Yuanjing Chen, Haiyang Mao*, Qiulin Tan, Chenyang Xue, Wen Ou,Jin Liu, Dapeng Chen, “Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology,” AIP Advances, 4, 031328, 2014.

8. Haiyang Mao, Di Wu, Wengang Wu, Jun Xu and Yilong Hao, “Fabrication of Diversiform Nanostructure Forests Based on Residue Nanomasks Synthesized by Oxygen Plasma Removal of Photoresist,” Nanotechnology, 2009, 20, 445304.

9. Haiyang Mao, Wengang Wu, Yulong Zhang, Ge Zhai and Jun Xu, “Fabrication of High-Compact Nanowires Using Alternating Photoresist Ashing and Spacer Technology,” Journal of Micromechanics and Microengineering, 20, 085029, 2010.

10. Haiyang Mao, Yulong Zhang, Wengang Wu, Gongchen Sun, and Jun Xu, “Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography,” Journal of Micromechanics and Microengineering, 21, 085004, 2011.

11. BAO AiDa , MAO HaiYang*, XIONG JiJun, CHEN ZhuoJie, OU Wen& CHEN DaPeng, “Nanopillar-forest based surface-enhanced Raman scattering substrates,” Science China: Information Sciences, 57, 2014, 082407:1–082407:8.

12. Ruirui Li, Bo Gui, Haiyang Mao*, Yudong Yang, Hao Yang, Jijun Xiong, Weibing Wang, "A Crystal-clear SERS-droplet with Evenly Distributed 3D hot-spots," The 32nd IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2019), Seoul, Korea, 27-31 January 2019, pp. 392-395

13. Ruirui Li, Haiyang Mao*, Guidong Chen, Jijun Xiong*, and Weibing Wang, "A Highly Sensitive SERS Device Based on A PDMS-CVD Prepared Substrate," IEEE SENSORS 2018, New Delhi, India, India, 28-31 Oct. 2018

14. Haiyang Mao*, Ruirui Li, Chengjun Huang, Yucong Jia, Weibing Wang, Anjie Ming, and Jijun Xiong “A highly SERS-active and flexible droplet based on carbon-metal composite nanoparticles,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 17), June 18-22, 2017, Taiwan, pp. 1344-1347.

15. Ruirui Li, Haiyang Mao*,Yudong Yang, Yuncong Jia, Huiqiong Xue, Jijun Xiong, and Weibing Wang, “Candle soot with broadband high absorptance for applications of infrared sensors,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 17), June 18-22, 2017, Taiwan, pp. 882-885.

16. Yudong Yang, Haiyang Mao*, Yuncong Jia, Huiqiong Xue, Jijun Xiong, Weibing Wang and Binbin Jiao, “Hybrid nanopillar forests with broadband high absorptance,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 17), June 18-22, 2017, Taiwan, pp. 1332-1335.

17. Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong, “Fabrication of Nanocone Forests with High Optical Absorption based on A Plasma Repolymerization Technique,” The 26th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2016), Shanghai, China, January 24-28, 2016, pp.1185-1188.

18. L.C. Tang, H.Y. Mao*, Y. Wang, W. Ou, W.G. Wu, J. J. Xiong, Q. L. Tan, “Fabrication of Nanowires from Polyimide for Transparent SERS Devices,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 15) , Anchorage, Alaska, USA, June 21-25, 2015, pp.1397-1400.

19. C. Lei, L.C. Tang, H.Y. Mao*, Y. Wang, J.J. Xiong , W. Ou, W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li, “Nanofiber Forests as A Humidity-Sensitive Material,” The 25th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2015), Estoril, Portugal, January 18-22,2015, pp.857-860.

20. Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong , W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li, “Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching,” The 25th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2015), Estoril, Portugal, January 18-22,2015, pp.320-323.

21. H.Y. Mao*, C. Lei, Y. J. Chen, Z. J. Chen, W. Ou, W. G. Wu, A. J. Ming, and D. P. Chen, “Nanofiber Forests with High Infrared Absorptance,” The 24th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2014), San Francisco, USA, January 26-30,2014, pp.644-647.

22. H.Y. Mao, P.P. Lv and W.G. Wu, “Microfluidic Surface-enhanced Raman Scattering Sensors for Online Monitoring Trace Chemical Mixing and Reaction,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 11). Bejing, China, June 5-9, 2011, pp.1970-1973.

23. H.Y. Mao, W.G. Wu, Y.L. Zhang, P.P. Lv, C. Qian, and J. Xu, “Silicon Nanopillar-Forest Based Microfluidic Surface-Enhanced Raman Scattering Devices,” The 24th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2011), Cancun, Mexico, January 23-27, 2011, 968-971.

24. Haiyang Mao, Wengang Wu, Qinghai Liu, Yulong Zhang, Yan Li, “Nanofiber-based Surface Microfluidic Structures for Cell and Nanoparticle Patterning,” The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, The Netherlands, October 4-7, 2010, 500-502.

25. H.Y. Mao, D. Wu, W.G. Wu, J. Xu, H.X. Zhang and Y.L. Hao, “Fabrication of Nanopillars Based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist,” The 22nd IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2009), Sorrento, Italy, January 25-29, 2009, 677-680. (EI收录号20092312105089)