在半导体高能粒子探测芯片及器件研究方面,针对我国在同步辐射源、加速器、空间探测和核研究等领域的重大需求,利用异质结技术创新地开展了硅漂移探测芯片、硅微条探测器、硅像素探测芯片和高纯锗探测器研究。硅漂移探测器的能量分辨率达到160eV;硅微条的能量分辨率为0.45%@5.6MeV 阿尔法粒子。
在高效太阳电池的研究及产业化方面,主要开展了高效n型TOP-Con电池、背接触电池和高效陷光绒面制备技术。研究的TOPCon电池效率达到24.8%;开发了成套的绒面陷光制备方法和纳米结构黑硅技术。在国内外知名期刊发表研究论文180余篇,授权专利62项。
代表成果:
1. The high energy resolution of Pt/Si alpha particle detector with Al2O3 passivation layer. Materials Science in Semiconductor Processing, 152(2022)107054.
2. Texture engineering of mono-crystalline silicon via alcohol-free alkali solution for efficient PERC solar cells. Journal of Energy Chemistry ,71 (2022) 104–112
3. Sulfonate groups assisted texturing for efficient monocrystalline silicon solar cells. Solar Energy Materials & Solar Cells ,254 (2023) 112250.
4. Fabrication of silicon PIN diode with SiGe junction for soft x-ray detector using low-temperature technology. Radiation Physics and Chemistry, 192 (2022) 109890
5. Design and fabrication of quasi-double-sided silicon drift detector for x-ray detection. Materials Science in Semiconductor Processing, 155 (2023) 107201
高频高压器件与集成研发中心