论文编号: | 172511O120100248 |
第一作者所在部门: | 三室一组 |
论文题目: | 基于MAZOS结构的高性能非挥发存储器应用 |
论文题目英文: | |
作者: | 刘明 |
论文出处: | SCI收录 |
刊物名称: | Semiconductor Science and Technology |
年: | 2010 |
卷: | |
期: | 25 |
页: | (055013)1-4 |
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影响因子: | 1.253 |
摘要: | In this paper, we report a MAZOS structure with a ZrO2 charge trapping layer for nonvolatile memory application. The superiority of this device over the traditional MANOS devices is much better data retention and enhanced program/erase efficiency. The MAZOS device exhibits excellent memory characteristics, including a large memory window of 7.1V under ±11V capacitance-voltage sweep, and a greatly improved data retention along with good endurance. |
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