论文编号: 172511O120120114
第一作者所在部门: 十室一组
论文题目:
论文题目英文:
作者: 姚湲
论文出处:
刊物名称: APPLIED PHYSICS LETTERS
: 2012
:
: 99
: 163506-1
联系作者: 姚湲
收录类别:
影响因子: 0
摘要: The electrostatic potential of the thin high-j dielectric film and related interfaces embedded in the gate stack can be profiled in high spatial resolution in the wedge-shape sample. The retrieved potential uncovers the uneven distribution with a maximum 15.660.7V in HfLaON dielectric film. It implies the non-uniform material distribution in high-j thin film and physical parameter of the film, such as permittivity, should not be considered as the constant.
英文摘要:
外单位作者单位:
备注: SCI收录