论文编号: | 172511O120120114 |
第一作者所在部门: | 十室一组 |
论文题目: | 无 |
论文题目英文: | |
作者: | 姚湲 |
论文出处: | |
刊物名称: | APPLIED PHYSICS LETTERS |
年: | 2012 |
卷: | |
期: | 99 |
页: | 163506-1 |
联系作者: | 姚湲 |
收录类别: | |
影响因子: | 0 |
摘要: | The electrostatic potential of the thin high-j dielectric film and related interfaces embedded in the gate stack can be profiled in high spatial resolution in the wedge-shape sample. The retrieved potential uncovers the uneven distribution with a maximum 15.660.7V in HfLaON dielectric film. It implies the non-uniform material distribution in high-j thin film and physical parameter of the film, such as permittivity, should not be considered as the constant. |
英文摘要: | |
外单位作者单位: | |
备注: | SCI收录 |
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