| 论文编号: | 1725110120160243 |
| 论文题目: | Atomic layer deposition assisted pattern transfer technology for ultra-thin block copolymer films |
| 作者: | 陈文辉 |
| 刊物名称: | Thin Solid Films |
| 年: | 2016 |
| 期: | 613 |
| 页: | 32 |
| 联系作者: | 赵超 |
| 论文编号: | 1725110120160243 |
| 论文题目: | Atomic layer deposition assisted pattern transfer technology for ultra-thin block copolymer films |
| 作者: | 陈文辉 |
| 刊物名称: | Thin Solid Films |
| 年: | 2016 |
| 期: | 613 |
| 页: | 32 |
| 联系作者: | 赵超 |
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