| 论文编号: | 1725110120160137 |
| 论文题目: | A Chemical Mechanical Planarization Model Including Global Pressure Distribution and Feature Size Effects |
| 作者: | 杨紫薇 |
| 刊物名称: | IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY |
| 年: | 2016 |
| 卷: | 6 |
| 期: | 2 |
| 页: | 177 |
| 联系作者: | 杨紫薇,徐勤志,陈岚 |
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