近期，由中国科学院微电子研究所、国科大微电子学院联合创办的国际全英文学术期刊《Journal of Microelectronic Manufacturing》（JoMM，国际标准期刊编号ISSN：2578-3769）成功出版了第二卷第一期。
本期专题文章如下：
Nitridation-Etch of Silicon Oxide in Fluorocarbon/Nitrogen Plasma: A Computational Study
Du Zhang, Yu-Hao Tsai, Hojin Kim et al. 2019 JoMM Volume 2, Issue 1: 19020103
The Variables and Invariants in the Evolution of Logic Optical Lithography Process
Qiang Wu. 2019 JoMM Volume 2, Issue 1: 19020101
JoMM 旨在发表集成电路制造领域中从实验室理论阶段到工业大规模量产阶段的研究成果，内容包括但不限于 Design、 Process、 Metrology & Yield Control、 Packaging、 Materials、 Equipment 等方面。 作为开放阅览电子学术期刊， JoMM 致力于实现快速发表，稿件录用后即时上线，可阅览、下载、引用。目前，JoMM正在进行2019年征稿，并免版面费，详情请查看官网www.lithotechsolutions.org.
欢迎投稿！
“Journal of Microelectronic Manufacturing”Volume 2, Issue1 is Published & Call for 2019 Papers
Jouranl of Microelectronic Manufacturing (JoMM) is an international peer-reviewed journal (ISSN: 2578-3769) co-founded by theInstitute of Microelectronics of Chinese Academy of Sciences (IMECAS) and School of Microelectronics, University of Chinese Academy of Sciences. JoMM Volume 2, Issue 1 (2019) is published recently.
Feature articles are:
Nitridation-Etch of Silicon Oxide in Fluorocarbon/Nitrogen Plasma: A Computational Study
Du Zhang, Yu-Hao Tsai, Hojin Kim et al. 2019 JoMM Volume 2, Issue 1: 19020103
The Variables and Invariants in the Evolution of Logic Optical Lithography Process
Qiang Wu. 2019 JoMM Volume 2, Issue 1: 19020101
JoMM aims at reporting the progress on the cutting-edge advanced semiconductor manufacturing sciences and technologies from early stage theories and experiments to industrial high volume manufacturing applications. Topic includes, but is not limited to Design, Process, Metrology & Yield Control, Packaging, Materials, Equipment. JoMM strives for shortened publication cycle, articles are published online for reading, downloading and citing as soon as accepted. Now JoMM is inviting papers for 2019 issues, and the publication charge is free. For more details, please visit www.lithotechsolutions.org.
Looking forward to your submissions!
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