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  • 姓名: 刘曼文
  • 性别: 女
  • 职称: 副研究员
  • 职务: 
  • 学历: 博士
  • 电话: 
  • 传真: 
  • 电子邮件: liumanwen@ime.ac.cn
  • 所属部门: 集成电路先导工艺研发中心
  • 通讯地址: 北京市朝阳区北土城西路3号

    简  历:

  • 教育背景


    2010-2019  湘潭大学  本科、博士

    工作简历


    2023--至今    中国科学院微电子研究所  副研究员

    2020-2023    中国科学院微电子研究所  博士后/特别研究助理

    2019-2020    鲁东大学  讲师/校聘副教授


    社会任职:

  • CERN DRD3委员会委员
    NIMA、IEEE TNS期刊审稿人

    研究方向:

  • 先进粒子/光子核心探测器芯片设计、仿真、工艺制作及测试

    承担科研项目情况:

  • 1. 2024-01至2027-12,承担国家自然科学基金面上项目,三维半球电极硅探测器快响应与抗辐照机理研究

    2. 2026-04至2029-03,承担中国科学院科研仪器研制项目,半导体探测器信号读出系统研制

    3. 2025-2028,CERN DRD3研发项目,Novel silicon 3D-trench pixel detector fabricated on the 8-inch wafer utilizing CMOS processing technologies

    4. 2024-01至2027-12,承担国家自然科学基金面上项目,三维半球电极硅探测器快响应与抗辐照机理研究

    5. 2021-01至2023-12,承担国家自然科学基金青年项目,基于三维开阖式壳型电极结构的硅探测器及其抗辐射性能研究

    6. 2024-03至2026-08,承担科技部国家重点研发计划(课题),CMOS工艺兼容的三维探测器芯片研制与量产化推广

    7. 2021-06至2022-06,承担中国博士后科学基金面上资助,基于反偏漂浮环的高效低噪超大面积三维X射线硅探测器表面电场优化研究

    8. 2020-09至2022-12,承担中国科学院特别研究助理择优项目(配套一项所长基金),新型硅光电探测器

    9. 2020-01至2022-12,承担烟台市科技创新发展计划项目,高性能医用成像核心器件半导体探测器芯片研发

    10. 2020-01至2022-12,承担烟台新旧动能转换研究院纵向项目,新型医用半导体探测器特殊芯片研发及制作

    11. 2019-09至2023-08,山东光探芯半导体科技有限公司委托横向,高性能硅探测器芯片设计开发

    12.2021-06至2023-06,航天五院委托横向,基于CMOS工艺的软X射线像素探测器研制


    代表论著:

  • 1. Manwen Liu*, Huimin Ji, Wenzheng Cheng, Chuan Liao, Le Zhang, Zheng Li, Bo Tang, Peng Zhang, Wenjuan Xiong, Trevor Vickey, E. Giulio Villani, Zhihua Li, Dengfeng Zhang, and Jun Luo. Design, fabrication and preliminary characterization of a novel 3D Trench-Column Sensor implemented in 8-inch CMOS-compatible technology. IEEE TRANSACTIONS ON NUCLEAR SCIENCE,vol. 73, no. 1, pp. 165-172, Jan. 2026

    2. Manwen Liu, Shuai Jiang, Wenzheng Cheng, Huimin Ji, Zhihua Li, Zheng Li. A double-sided 3D trench electrode detector using an 8-inch CMOS process: 3D simulation and experimental investigation. Nuclear Instruments and Methods in Physics Research A 1070 (2025) 169943

    3. Wenzheng Cheng, Manwen Liu*, Chenchen Zhang, Daimo Li, and Zhihua Li*. Design of Fast Response Back-Illuminated 3-D Composite Electrode Silicon Detector Utilizing the RIE-Lag Phenomenon. IEEE Journal of the Electrons Devices Society 2024, 12

    4. Jun Zhao, Tao Long, Mingyang Wang, Manwen Liu*, Minghua Tang and Zheng Li. Design and 3D Electrical Simulations for a Controllable Equal-Gap Large-Area Silicon Drift Detector. Sensors 2024, 24, 1388

    5. Manwen Liu*, Wenzheng Cheng, Zheng Li, Zhenyang Zhao, Zhihua Li*. 3D Simulation, Electrical Characteristics and Customized Manufacturing Method for a Hemispherical Electrode Detector. Sensors 2022, 22, 6835

    6. Wenzheng Cheng, Manwen Liu*, Zheng Li, Zhenyang Zhao, Zhihua Li*. Optimal Design of Multiple Floating Rings for 3D Large-Area Trench Electrode Silicon Detector. Sensors 2022, 22, 6352

    7. Daoqun Liu, Tingting Li, Bo Tang, Peng Zhang, Wenwu Wang, Manwen Liu*, Zhihua Li*. A Near-Infrared CMOS Silicon Avalanche Photodetector with Ultra-Low Temperature Coefficient of Breakdown Voltage. Micromachines 2022, 13, 47

    8. Manwen Liu*, Shunmao Lu, Zheng Li*. Theoretical bases of hypothetical sphere-electrode detectors and practical near-sphere-electrode (semisphere electrode and near semisphere electrode) detectors. Journal of Physics D: Applied Physics 2021, 54, 045101

    9. Manwen Liu*, Xinqing Li, et al. Radiation Hardness Property of Ultra Fast 3D-Trench Electrode Silicon Detector on N-Type Substrate. Micromachines 2021, 12, 1400

    10. Manwen Liu*, Zheng Li, Zhi Deng, Li He, Bo Xiong, Yuyun Li, Mingfu Feng, Lipeng Tang and Min Cheng. 314 mm2 Hexagonal Double-Sided Spiral Silicon Drift Detector for Soft X-Ray Detection Based on Ultra-Pure High Resistance Silicon. Frontiers in Materials 2021, 8, 700137

    11. Xinqing Li, Manwen Liu* and Zheng Li*. Design and simulation of silicon detector cells with spiral ring electrode structures. AIP Advances 2021, 11, 045127

    12. Manwen Liu*, Tao Zhou and Zheng Li*. Electrical Properties of Ultra-Fast 3D-Trench Electrode Silicon Detector. Micromachines 2020, 11, 674

    13. Manwen Liu*, Wu Liu, Zheng Li*, Tao Zhou, Hengheng Mu, Xinwang Zhang, Shunmao Lu. Design, electrical properties and fabrication method study of a novel 3D Compound Shell Electrode silicon detector. Nuclear Instruments and Methods in Physics Research A 2020, 978, 164418

    14. Manwen Liu, Jian Tan and Zheng Li*. Design and optimization of a novel 3D detector--The 3D-open-shell-electrode detector. AIP Advances 2018, 8, 045202

    15. Manwen Liu and Zheng Li*. Electrical properties study under radiation of the 3D-Open-Shell-Electrode Detector. AIP Advances 2018, 8, 055211

    16. Manwen Liu, Zheng Li* and Mingfu Feng. 3D Simulation and Modeling of Ultra-fast 3D Silicon Detectors. MATEC Web of Conference 108,09006(2017), ICMAA 2017

    17. Manwen Liu and Zheng Li*. Development of ultra-fast 3D Silicon Detectors: 3D Simulation and Modeling of 3D-trench Electrode Detector. Advances in Engineering Research 2017, 110, 99-105

    18.Manwen Liu and Zheng Li*. Generalization of the One Dimensional Modeling and Design Considerations of Spiral Si Drift Detectors: Flat (Straight) Drift Channels and Constant Drift Fields. Nuclear Instruments and Methods in Physics Research A 2016, 824, 432–433



    专利申请:

  • 1. 刘曼文等,一种三维电极探测器及其制作方法,ZL202411186536.7

    2. 刘曼文等,一种新的近半球型探测器及其制备方法,ZL202210917609.X

    3. 刘曼文等,一种点状三维球状超小电容半导体探测器模型及应用,ZL202010855518.9

    4. 刘曼文等,一种螺旋环电极硅阵列探测器,ZL202010903799.0

    5. 刘曼文等,探测器及其制作方法以及装置,ZL202110936536.4

    6. 刘曼文等,一种探测器,ZL202110937946.0

    7. 刘曼文等,三维沟槽电极硅探测器及其制备方法,ZL202210224395.8

    8. 刘曼文,成文政,李志华,双面漂浮环的三维沟槽电极探测器及其制备方法,ZL202210225615.9

    9. 刘曼文;成文政;李志华,中央电极贯穿的三维沟槽电极探测器及其制备方法,ZL202210224384.X

    10. 刘曼文,李志华,一种雪崩探测器及制备方法,ZL202110481115.7



    获奖及荣誉:

  • 微电子研究所优秀教师“芯光奖”、先导之星

    博士研究生国家奖学金

    湖南省优秀博士毕业生

    中国科学院微电子研究所研究生荣誉奖学金--特等奖