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  • 姓名: 姚佳欣
  • 性别: 男
  • 职称: 副研究员
  • 职务: 
  • 学历: 
  • 电话: 
  • 传真: 
  • 电子邮件: yaojiaxin@ime.ac.cn
  • 所属部门: 集成电路先导工艺研发中心
  • 通讯地址: 北京朝阳区北土城西路3号

    简  历:

  • 教育背景

    2015-09--2020-07 中国科学院大学 工学博士

    2011-09--2015-06 湖南大学 工学学士

    工作简历

    2024-08~现在, 中国科学院微电子研究所, 副研究员

    2021-01~2024-08,中国科学院微电子研究所, 助理研究员




    社会任职:

    研究方向:

  • 先进逻辑CMOS器件工艺及集成,高k/金属栅,多阈值技术

    承担科研项目情况:

  • 1、中科院先导项目,参与

    2、国家自然科学基金青年项目,主持

    3、北京市自然科学基金青年项目,主持


    代表论著:

  • [1]. Y. Yu, J. Yao, L. Cao, Y. Wang, Y. Wei, J. Xu, Z. Wang, H. Zhang, Y. Hu, Q. Zhang, X. Wang, J. Luo, H. Yin, Fabricated Parasitic-Interbridge-Free TreeFETs for CMOS Low Power ApplicationsIEEE Electron Device Letters2026通讯作者

    [2]. Y. Wang, J. Yao, Y. Wei, Q. Zhang, F. Wang, S. Liu, L. Cao, Y. Yu, W. Xiong, S. Yang, J. Li, H. Yin, X. Wang, J. Luo, LaOx Atomic Flip Dipole Technique with Single Dipole Shifter in CMOS GAA NSFETsIEEE Transactions on Electron Devices2026通讯作者

    [3]. Y. Wang, J. Yao, Y. Wei, Q. Zhang, H. Yin, Experiment Investigation of La2O3 Dipole-Last Cap-Less VFB Tuning Technology With Low-Thermal Post Deposition AnnealIEEE Journal of the Electron Devices Society2026通讯作者

    [4]. Y. Wang, J. Yao, Y. Wei, Q. Zhang, F. Wang, S. Liu, L. Cao, Y. Yu, W. Xiong, S. Yang, J. Li, H. Yin, X. Wang, J. Luo, First Demonstration of LaOx Atomic Flip Dipole Technique with Single Dipole Shifter in CMOS GAA NSFETs to Achieve ~66 mV/level Multi-VTs within 330 mV RangeInternational Electron Devices Meeting (IEDM)2025,通讯作者Toprankedstudentpaper

    [5]. Y. Wei, J. Yao, Y. Wang, Q. Zhang, S. Yang, L. Cao, Q. Li, X. Zhang, Y. Zhang, H. Yang, J. li, Li, H. Yin, X. Wang, J. Luo, First Demonstration of 9N+9P Complete Dipole Multi-VTs CMOS Integration with Atomic Interfacial Dipole Buffer Layer Technique in GAA NSFETsSymposium on VLSI Technology and Circuits2025通讯作者

    [6]. Y. Wei, J. Yao, Y. Wang, Q. Zhang, J. Gao, X. Wang, J. Luo, H. Yin, Linear Fine-tuning VFB and Improved Interface via Novel Al2O3 Atomic in-situ Dipole Buffer Layer (DBL) in ALD La2O3 Dipole-first Stack, IEEE Electron Device Letters2025通讯作者

    [7]. Y. Wang, J. Yao, Y. Wei, Q. Zhang, N. You, S. Yang, H. Yin, Investigation of TiN/LaOx Interface Dipole Effect on Negative Flat-Band Voltage (VFB) Shift in TiN/LaOx/HfO2/SiO2 Gate Stacks Using Dipole-Last TechnologyIEEE Transactions on Electron Devices2025通讯作者

    [8]. X. Zhang, Q. Li, L. Cao, Q. Zhang, R. jiang, P. Wang, J. Yao, H. Yin, Performance Optimization of Fabricated Nanosheet GAA CMOS Transistors and 6T-SRAM Cells via Source/Drain Doping EngineeringIEEE Journal of the Electron Devices Society2025通讯作者

    [9]. Y. Wei, J. Yao, Q. Zhang, G. Sang, Y. Bao, J. Gao, J. Li, J, Luo, H. Yin, Sub-5-Å La2O3 In Situ Dipole Technique for Large VFB Modulation With EOT Reduction and Improved Interface for HKMG TechnologyIEEE Transactions on Electron Devices2024通讯作者

    J. Yao, Y. Wei, S. Yang, H. Yang, G. Xu, Y. Zhang, L. Cao, X. Zhang, Q. Liu, Z. Wu, H. Yin, Q. Zhang, J. Li, J. Luo, Record 7(N)+7(P) Multiple VTs Demonstration on GAA Si Nanosheet n/pFETs using WFM-Less Direct Interfacial La/Al-Dipole TechniqueInternational Electron Devices Meeting (IEDM)20221作者


    专利申请:

    获奖及荣誉:

  • 博士国家奖学金

    中科院“朱李月华”奖学金

    北京市优秀毕业生